15 August 1984 Novel Operational Regime Of High-Efficiency KrF Lasers
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The novel operational regime of high-efficiency KrF lasers is presented. The excitation sources are intense electron beams and intense proton beams. Theoretical evaluation of electron-beam-excited KrF laser using one atmospheric-pressure, argon-free mixtures showed that by using high-excitation-rate and shorter-excitation-pulsewidth pumping, higher intrinsic laser efficiency than conventional argon-rich, high-pressure mixtures is attainable. The experimental results are also presented.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Minoru Obara, Minoru Obara, Tomoo Fujioka, Tomoo Fujioka, Fumihiko Kannari, Fumihiko Kannari, Akira Suda, Akira Suda, } "Novel Operational Regime Of High-Efficiency KrF Lasers", Proc. SPIE 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers, (15 August 1984); doi: 10.1117/12.942566; https://doi.org/10.1117/12.942566


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