15 August 1984 Photothermal Deflection Analysis Of Uv Optical Thin Films
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Abstract
This paper offers a status report of photothermal-deflection microscopy applied to defect analysis in UV dielectric thin films. Absorption maps obtained by this technique from such films are presented and detection limits are discussed. A comparison with other relevant observations such as laser damage is being undertaken.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Schmid, A. Schmid, D. Smith, D. Smith, M. Guardalben, M. Guardalben, J. Abate, J. Abate, } "Photothermal Deflection Analysis Of Uv Optical Thin Films", Proc. SPIE 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers, (15 August 1984); doi: 10.1117/12.942583; https://doi.org/10.1117/12.942583
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