An Ellipsometry System For High Accuracy Metrology Of Thin Films

George A. Candela; Deane Chandler-Horowitz

doi:10.1117/12.943040

15 October 1984 An Ellipsometry System For High Accuracy Metrology Of Thin Films

George A. Candela, Deane Chandler-Horowitz

Proceedings Volume 0480, Integrated Circuit Metrology II; (1984) https://doi.org/10.1117/12.943040
Event: 1984 Technical Symposium East, 1984, Arlington, United States

Abstract

A computer-controlled spectroscopic ellipsometer of high accuracy has been designed and constructed. A theta-two-theta goniometer unit and optical rail system allows various ellipsometric methods to be used to measure the parameters A and 4). Three important methods under study for accuracy, precision, and speed of measurement are the conventional null method, the rotating analyzer method, and the principal angle method. All the goniometer angles, including the angle of incidence, can be measured to an accuracy of 0.001 deg. The present light sources are two lasers with fixed wavelengths, 632.8 nm and 441.6 nm, in addition to a monochromator that can be used to scan the wavelength range from 190 to 2600 nm. A unique sample alignment system which utilizes two quadrant detectors has been developed and a simple but very effective nulling scheme is used. This instrument is primarily used for the metrology of semiconductor materials and for the calibration of reference standards for thin film thickness and refractive index.

Citation Download Citation

George A. Candela and Deane Chandler-Horowitz "An Ellipsometry System For High Accuracy Metrology Of Thin Films", Proc. SPIE 0480, Integrated Circuit Metrology II, (15 October 1984); https://doi.org/10.1117/12.943040

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available