Semiconductor devices are sensitive to X-rays. Array sensors can be constructed with integrated circuits as CCD's. Their application -to X-ray imaging is discussed especially to get a high spatial resolution. This is shown to be possible with some 10 μm resolution using a CCD-sensor covered with a converter screen. Furthermore such a screen protects the CCD against radiation damage. It could be demonstrated that soft X-radiation produces most of the damage. The life time of a sensor can be enhanced by a factor of more than 100 if a converter screen absorbs most of the soft radiation.