Scanning with laser illumination is becoming increasingly utilized as a tool to inspect materials, parts and assemblies for a variety of features, including dimension, orientation, flaws, contamination, patterns and transit velocity. This method of acquiring an image has a number of technical advantages over more conventional vision systems. Improvements in resolution, depth of field, contrast, signal to noise ratio, speed and versatility can be realized when scanning laser light as a detection method. A typical inspection scanning system is described and a number of features are discussed. Trade-offs between alternative methods are given. One drawback previously facing users of laser scanning systems has been polygon deflector induced tracking errors in the scan. A. novel method of reducing such errors is described. Performance characteristics and typical in-practice advantages are listed.