12 December 1984 Grating Interferometry For Positioning The X-Y Stages Of A Wafer Stepper
Author Affiliations +
Abstract
This paper relates the performances of an interferometry based upon a bidimensional grating taken as a reference. This interferometry permits to position the X-Y stage of a wafer stepper with a resolution comparable with a laser interferometer. The principle and the performances of an X-Y table controlled by this interferometer are presented.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Berger, "Grating Interferometry For Positioning The X-Y Stages Of A Wafer Stepper", Proc. SPIE 0503, Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II, (12 December 1984); doi: 10.1117/12.944823; https://doi.org/10.1117/12.944823
PROCEEDINGS
5 PAGES


SHARE
Back to Top