Paper
17 January 1985 Statistical Effects In The Measurement And Characterization Of Smooth Scattering Surfaces
E. L. Church
Author Affiliations +
Abstract
Nature obliges us to use a statistical description of the scattering of light from randomly-rough surfaces. This paper discusses the role of statistical models and fluctuation phenomena in the measurement and characterization of such surfaces using area and profiling techniques.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. L. Church "Statistical Effects In The Measurement And Characterization Of Smooth Scattering Surfaces", Proc. SPIE 0511, Stray Radiation IV, (17 January 1985); https://doi.org/10.1117/12.945030
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Scattering

Light scattering

Surface finishing

Statistical analysis

Scatter measurement

Data modeling

Error analysis

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