3 September 1985 A Portable Scatterometer For Optical Shop Use
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Proceedings Volume 0525, Measurement and Effects of Surface Defects & Quality of Polish; (1985) https://doi.org/10.1117/12.946358
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States
Abstract
The scattering of optical components has become a more and more critical issue in modern sensor systems. This is a result of improved performance capabilities on the part of detectors and of optical elements themselves, as well as an increased awareness of the effects of scatter on system performance. There are several programs that evaluate scatter in complicated optical trains, the best known of which are APART and GUERAP (Arizona Paraxial Analysis of Radiative Transfer and General Unwanted Energy Radiation Analysis Program). These programs require component scatter data as inputs for the analysis and even the beginning design approaches. These data have generally been generated with laboratory instruments that were essentially goniometric radiometers. The data have been difficult to obtain and usually obtained for small representative samples of the real surfaces. If, in the process of manufacture of the parts a measurement of the scatter was made, it was done with a relatively crude jerry-rigged apparatus. Sometimes the measurements made this way were quite accurate, but they were never easy.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William L. Wolfe, Kathleen Magee, Douglas W. Wolfe, "A Portable Scatterometer For Optical Shop Use", Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946358; https://doi.org/10.1117/12.946358
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