3 September 1985 A Schlieren Microscope
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Proceedings Volume 0525, Measurement and Effects of Surface Defects & Quality of Polish; (1985) https://doi.org/10.1117/12.946359
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States
Abstract
A Schlieren microscope is described which can be used to measure profiles of optical quality surfaces. The intensities in the image field are measured with a photo-diode array. By measuring a reference sample and the object, both with and without knife it is possible to correct for different errors. Shape and roughness can be measured with accuracies of 10 nm and 1 nm respectively with a horizontal resolution of about 3μm. The system is fast and relatively insensitive to vibra-tion.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. Prast, G. Prast, } "A Schlieren Microscope", Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946359; https://doi.org/10.1117/12.946359
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