3 September 1985 Optical Profilers For Surface Roughness
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Proceedings Volume 0525, Measurement and Effects of Surface Defects & Quality of Polish; (1985); doi: 10.1117/12.946361
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States
Abstract
Different possible interferometers for surface roughness measurements are described. Advantages and disadvantages of optical techniques compared to stylus instruments are discussed. Important features of phase-shifting techniques for surface roughness measurements are given. The WYKO NCP-1000M optical profiler is described along with techniques for measuring surfaces having an rms roughness on the order of 0.1 nm.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James C. Wyant, "Optical Profilers For Surface Roughness", Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946361; https://doi.org/10.1117/12.946361
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KEYWORDS
Interferometers

Surface roughness

Surface finishing

Microscopes

Error analysis

Phase shift keying

Polishing

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