3 September 1985 Scanning Electron Microscopy Studies Of Laser Damage Initiating Defects In ZnSe/ThF4 And SiH/Si02 Multilayer Coatings
Author Affiliations +
Proceedings Volume 0525, Measurement and Effects of Surface Defects & Quality of Polish; (1985) https://doi.org/10.1117/12.946354
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States
Abstract
Scanning electron microscopy (SEM) was used to identify four distinct laser damage mor-phologies in ZnSe/ThF4 multilayer mirrors. There were three types of defect-initiated damage morphologies. Oblong-shaped damage sites oriented perpendicular to the electric field vector of the laser were associated with particulates on or near the surface of the ZnSe/ThF4 multilayers. Circular-shaped damage sites were initiated by particulates embed-ded beneath the top ZnSe layer. Selective laser damage at pinholes was identified as the third defectinitiated damage morphology. In addition to defect-initiated damage, stress-related damage was indicated by cracks near or within laser damage craters and erosion sites. Selective laser damage at nodular growth defects in SiH/Si02 multilayers was also observed using SEM. Samples with different numbers of nodules were prepared in-house using RF-diode, reactive sputtering. The low-defect mirror had the highest laser damage onset, and the mirror with the highest number of nodules had the lowest laser damage onset.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. F. Johnson, L. F. Johnson, E. J. Ashley, E. J. Ashley, T. M. Donovan, T. M. Donovan, J. B. Franck, J. B. Franck, R. W. Woolever, R. W. Woolever, R. Z. Dalbey, R. Z. Dalbey, } "Scanning Electron Microscopy Studies Of Laser Damage Initiating Defects In ZnSe/ThF4 And SiH/Si02 Multilayer Coatings", Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946354; https://doi.org/10.1117/12.946354
PROCEEDINGS
13 PAGES


SHARE
Back to Top