30 September 1985 Hybrid Microelectronic Laser Machining Requirements
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Proceedings Volume 0527, Applications of High Power Lasers; (1985) https://doi.org/10.1117/12.946395
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States
Abstract
Industrial application of lasers in the micro electronic industry is an established fact. The most prolific is in resistor trimming and ceramic substrate machining. Though the application has been applied since the 1960's there are still unresolved problems in the economic use of lasers in this area.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul F. Parks, Paul F. Parks, "Hybrid Microelectronic Laser Machining Requirements", Proc. SPIE 0527, Applications of High Power Lasers, (30 September 1985); doi: 10.1117/12.946395; https://doi.org/10.1117/12.946395
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