20 June 1985 A Computer-Controlled Experimental FIB System
Author Affiliations +
Abstract
A focused-ion-beam writing system for experimental use will be described. This system was designed to be simple and to be flexible enough for doing experiments. The system configuration, ion sources, and some considerations regarding alignment signals will be mentioned.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Kato, T. Kato, K. Saitoh, K. Saitoh, Y. Watakabe, Y. Watakabe, } "A Computer-Controlled Experimental FIB System", Proc. SPIE 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV, (20 June 1985); doi: 10.1117/12.947495; https://doi.org/10.1117/12.947495
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT


Back to Top