20 June 1985 Performance Testing Of The Waferwriter Tm Electron Beam Direct Write System
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Performance tests on the Waferwriter TM system, a high brightness electron beam direct write system, are described. The Waferwriter system is an ultra-high current density, variable size round beam direct write system, capable of exposing existing popular photo-resists at higher rates than conventional shaped beam systems in the micron and submicron feature size range. Performance tests are described covering overlay accuracy, alignment, resolution, and throughput. The system is the first to meet the DoD's VHSIC requirements for E-beam direct write systems.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. R. Livesay, W. R. Livesay, J.Dennis Russell, J.Dennis Russell, Dave Harry, Dave Harry, James S. Hulett, James S. Hulett, A. L. Rubiales, A. L. Rubiales, J. E. Wolfe, J. E. Wolfe, } "Performance Testing Of The Waferwriter Tm Electron Beam Direct Write System", Proc. SPIE 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV, (20 June 1985); doi: 10.1117/12.947480; https://doi.org/10.1117/12.947480


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