Optimization Of Resist Optical Density For High Resolution Lithography On Reflective Surfaces

Andrew V. Brown; William H. Arnold

doi:10.1117/12.947841

18 April 1985 Optimization Of Resist Optical Density For High Resolution Lithography On Reflective Surfaces

Andrew V. Brown, William H. Arnold

Proceedings Volume 0539, Advances in Resist Technology and Processing II; (1985) https://doi.org/10.1117/12.947841
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

The effect of positive photo resist's unbleachable absorbance on standing wave effects, reflective notching, scumming, exposure latitude and time, bleaching rates, and resist contrast has been evaluated using both theoretical simulation and experimental data. The addition of unbleachable dye to the resist film is shown to reduce reflective notching and the variation of dose with changing resist thickness. Adding dye also leads to a larger standing wave toe on the resist profiles and to increased exposure times. Bleaching rates are reduced and resist profiles are decreased from the vertical. Data is presented showing the improved CD control using dyed resist on interconnect layers.

Citation Download Citation

Andrew V. Brown and William H. Arnold "Optimization Of Resist Optical Density For High Resolution Lithography On Reflective Surfaces", Proc. SPIE 0539, Advances in Resist Technology and Processing II, (18 April 1985); https://doi.org/10.1117/12.947841

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available