Plasma Performance Of Positive Resist Systems Using Spin-On Antireflective Coatings In Cl[sub]2[/sub]/Sf[sub]6[/sub], Chf[sub]3[/sub]/O[sub]2[/sub] And Cc1[sub]4[/sub] Plasmas

Geoffrey A. Hungerford; William J.O. Boyle

doi:10.1117/12.947838

18 April 1985 Plasma Performance Of Positive Resist Systems Using Spin-On Antireflective Coatings In Cl₂/Sf₆, Chf₃/O₂ And Cc1₄ Plasmas

Geoffrey A. Hungerford, William J.O. Boyle

Author Affiliations +

Proceedings Volume 0539, Advances in Resist Technology and Processing II; (1985) https://doi.org/10.1117/12.947838
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

Linewidth control and resolution have become increasingly more difficult for optical lithography in the one micron region because of reflective substrates and severe topography. Recently, much attention has been given to spin-on Antiretlective Coatings (ARC) as an easily implemented solution to standing waves and scattered reflections. This leads to improved linewidth control and better resolution for the same aligner and resist system. This paper investigates ARC undercutting and its effect on the final etched image for popular anisotropic plasmas as used to etch polysilicon gates, silox contact holes, and aluminium interconnections. Brewer ARC-PN4, ARC-PN2, and Waycoat 204 positive photoresist were used and imaged using a THE 800-SLR 10X stepper. It was found that final etched features were insensitive to spin-on ARC baking and developing conditions making this a useful technique for production in the one micron region.

Citation Download Citation

Geoffrey A. Hungerford and William J.O. Boyle "Plasma Performance Of Positive Resist Systems Using Spin-On Antireflective Coatings In Cl₂/Sf₆, Chf₃/O₂ And Cc1₄ Plasmas", Proc. SPIE 0539, Advances in Resist Technology and Processing II, (18 April 1985); https://doi.org/10.1117/12.947838

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available