Use Of A Quartz Crystal Microbalance Rate Monitor To Examine Photoproduct Effects On Resist Dissolution

W. D. Hinsberg; C. G. Willson; K. K. Kanazawa

doi:10.1117/12.947808

18 April 1985 Use Of A Quartz Crystal Microbalance Rate Monitor To Examine Photoproduct Effects On Resist Dissolution

W. D. Hinsberg, C. G. Willson, K. K. Kanazawa

Proceedings Volume 0539, Advances in Resist Technology and Processing II; (1985) https://doi.org/10.1117/12.947808
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

A new general method for measuring dissolution kinetics of thin films has been developed. This technique employs a quartz crystal microbalance to measure the mass of the dissolving thin film. The method allows the measurement of very rapid dissolution rates, and can also be used to study the dissolution kinetics of thick or opaque films. The technique has several advantages over alternative in situ methods based on optical interferometry or capacitance. This instrument has been used to examine the effects of photoproducts on the dissolution kinetics of positive photoresist. The influence of photolytically generated carboxylic acid, and the nitrogen byproduct entrapped in the film, have been independently assessed by comparing the solubility of films of novolac resin, and films of resin plus carboxylic acid photoproduct, with that of exposed photoresist. Our results indicate that the acid does not significantly influence the solubility of the resin, and that entrapped gaseous photoproducts exert a rate-enhancing effect.

Citation Download Citation

W. D. Hinsberg, C. G. Willson, and K. K. Kanazawa "Use Of A Quartz Crystal Microbalance Rate Monitor To Examine Photoproduct Effects On Resist Dissolution", Proc. SPIE 0539, Advances in Resist Technology and Processing II, (18 April 1985); https://doi.org/10.1117/12.947808

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available