20 November 1985 Ion Beam Reduction Of Optical Scatter From Coated Metal Surfaces
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Proceedings Volume 0540, Southwest Conf on Optics '85; (1985) https://doi.org/10.1117/12.976154
Event: 1985 Albuquerque Conferences on Optics, 1985, Albuquerque, United States
Abstract
Deposition of thin (0.2 - 2.0 μm) metal film on a polished metal substrate changes its scatter characteristic. The light scatter due to high spatial frequency structure is reduced by as much as a factor of ten; total integrated scatter is reduced by as much as a factor of four. The effect is strongly influenced by the deposition mechanism employed, film and substrate materials and film thickness. The effect is most apparent when using simultaneous Ar+ bombardment during film deposition (i.e., ion assisted deposition).
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. A. Al-Jumaily, J. J. McNally, K. C. Jungling, J. R. McNeil, "Ion Beam Reduction Of Optical Scatter From Coated Metal Surfaces", Proc. SPIE 0540, Southwest Conf on Optics '85, (20 November 1985); doi: 10.1117/12.976154; https://doi.org/10.1117/12.976154
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