Paper
20 November 1985 Surface Potential As A Laser Damage Diagnostic
M. F. Becker, J. A. Kardach, A. F. Stewart, A. H. Guenther
Author Affiliations +
Proceedings Volume 0540, Southwest Conf on Optics '85; (1985) https://doi.org/10.1117/12.976148
Event: 1985 Albuquerque Conferences on Optics, 1985, Albuquerque, United States
Abstract
We investigated the relationship between surface potential changes and N-on-1 laser surface damage on a wide range of materials. The surface potential or work function difference was measured as a function of position by a small non-contacting Kelvin type probe. The design and operation of the probe is described. With this probe, the change in surface potential due to laser irradiation was mapped with a '1,1 mm resolution. Although no consistent predamage changes in potential were observed, all larger damage features had surface potential changes associated with them. All the insulating materials studied, fluoride and oxide thin films and bare fused silica and magnesium fluoride substrates, showed the accumulation of negative charge in areas more than ten times larger in diameter than the laser beam spot or damage area. This initial charge was observed to decay on the time scale of hours to a lower fixed value of potential.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. F. Becker, J. A. Kardach, A. F. Stewart, and A. H. Guenther "Surface Potential As A Laser Damage Diagnostic", Proc. SPIE 0540, Southwest Conf on Optics '85, (20 November 1985); https://doi.org/10.1117/12.976148
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KEYWORDS
Thin films

Laser induced damage

Copper

Dielectrics

Silicon

Magnesium fluoride

Silica

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