20 November 1985 Thin-Film Microstructure Modeling
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Proceedings Volume 0540, Southwest Conf on Optics '85; (1985) https://doi.org/10.1117/12.976106
Event: 1985 Albuquerque Conferences on Optics, 1985, Albuquerque, United States
A model of thin-film growth in which the molecules are represented by hard disks has been implemented on a microcomputer. The effect on film microstructure of variations in relaxation parameter, A, the ratio of mean distance traveled by a molecule after impingement on the film surface to a molecular diameter, has been investigated. Nodular growth has been simulated in single and two-layer systems. Violations of the tangent law of column orientation have been examined.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Liao Bangjun, Liao Bangjun, H. A. Macleod, H. A. Macleod, } "Thin-Film Microstructure Modeling", Proc. SPIE 0540, Southwest Conf on Optics '85, (20 November 1985); doi: 10.1117/12.976106; https://doi.org/10.1117/12.976106


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