Fourier Transform Infrared Ellipsometry Of Thin Polymer Films

R . T. Graf; J. L. Koenig; H. Ishida

doi:10.1117/12.970736

20 December 1985 Fourier Transform Infrared Ellipsometry Of Thin Polymer Films

R . T. Graf, J. L. Koenig, H. Ishida

Proceedings Volume 0553, Fourier and Computerized Infrared Spectroscopy; (1985) https://doi.org/10.1117/12.970736
Event: 1985 International Conference on Fourier and Computerized Infrared Spectroscopy, 1985, Ottawa, Canada

Abstract

Reflection spectra containing phase as well as intensity information were collected on a FT-IR spectrometer using two linear polarizers. The sample consisted of a poly(vinyl acetate) (PVAc) film on a copper substrate. Using well known principles of ellipsometry, the relative phase retardation (delta) and relative amplitude (psi) were calculated from these measurements.

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R . T. Graf, J. L. Koenig, and H. Ishida "Fourier Transform Infrared Ellipsometry Of Thin Polymer Films", Proc. SPIE 0553, Fourier and Computerized Infrared Spectroscopy, (20 December 1985); https://doi.org/10.1117/12.970736

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