A Digital Wafer Image and Geometry Processor

George Huang; Dann Wang; Edward Huang; Chien Huang

doi:10.1117/12.966260

19 December 1985 A Digital Wafer Image and Geometry Processor

George Huang, Dann Wang, Edward Huang, Chien Huang

Proceedings Volume 0557, Automatic Inspection and Measurement; (1985) https://doi.org/10.1117/12.966260
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

I. Introduction: Digital image inspection and measurement systems, in recent years, have made significant progress toward small size, light weight, and low cost, as computer technology and specialized processing hardware have made rapid advances. This paper is a report of a developmental effort on an image processor based on IBM PC XT/AT for semiconductor manufacturing industry where extensive inspection and measurement take place [1-3].

Citation Download Citation

George Huang, Dann Wang, Edward Huang, and Chien Huang "A Digital Wafer Image and Geometry Processor", Proc. SPIE 0557, Automatic Inspection and Measurement, (19 December 1985); https://doi.org/10.1117/12.966260

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