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25 October 1985 Measurement of Diamond-Turned Metal Surfaces by Light Scattering
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Abstract
The roughness parameters of diamond-turned surfaces are obtained from the Fourier transform of scattered light intensity. Theoretical consideration of the scattered intensity and its Fourier transform is made. It is shown that the Fourier transform of the scattered intensity is equivalent to the autocorrelation of the surface. From this autocorrelation function, we can derive the amplitude and frequency of the periodic tool marks, and the rms roughness and correlation length of the random surface component. Some experimental results for diamond turned aluminum metal surfaces are also given. The comparison of the light scattering data and stylus measurement is made. It shows a qualitative agreement.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Junji Ohtsubo "Measurement of Diamond-Turned Metal Surfaces by Light Scattering", Proc. SPIE 0558, Inverse Optics II, (25 October 1985); https://doi.org/10.1117/12.949577
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