10 May 1986 Grating Efficiency Measurement And Automated Scatter Inspection System (GEMASIS)
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Abstract
The GEMASIS is an automated device for general characterization of diffraction and surface scatter. Samples can be measured for out-of-plane as well as for in-plane incidence conditions. In-plane characterization includes angle-resolved measurements of scatter and diffraction orders. The device is described and typical data are shown.
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R. A. House, R. A. House, R . D. Petty, R . D. Petty, J. J. Johnston, J. J. Johnston, B. R. Key, B. R. Key, G. J. Denton, G. J. Denton, "Grating Efficiency Measurement And Automated Scatter Inspection System (GEMASIS)", Proc. SPIE 0560, Diffraction Phenomena in Optical Engineering Applications, (10 May 1986); doi: 10.1117/12.949615; https://doi.org/10.1117/12.949615
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