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6 May 1985 Characterization Of Multilayered Structures For Soft X-Ray Mirrors
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Abstract
Three different experimental techniques are applied to the measurement of physical parameters involved in the determination of the optical performances of multilayers designed for soft X-ray mirrors. Geometrical parameterssuch as single layer thicknesses, multilayer period and interface roughness are evaluated by using soft X-ray reflectometry during the deposition process and grazing incidence X-ray reflectometry with the Cu K, radiation after the multilayer fabrication. The growth mechanism and surface composition of ultra-thin films constituting the multilayers are obtained by Auger electron spectroscopy performed during the layer deposition. The whole of these measurements is applied to elaborate a modelisa-tion of the real multilayers in view of their optical applications.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. P. Chauvineau, J. Corno, D. Decanini, L. Nevot, and B. Pardo "Characterization Of Multilayered Structures For Soft X-Ray Mirrors", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949673
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