6 May 1985 Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating
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Abstract
The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multilayer with many layers at short wavelengths.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eberhard Spiller, Alan E. Rosenbluth, "Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949671; https://doi.org/10.1117/12.949671
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