6 May 1985 F-beam Evaporated Multilayer Soft X-ray Coatings, Analyzed With Cu-Kα Radiation
Author Affiliations +
Results are presented for deposition of multilayer soft X-ray coatings, monitored during deposition with soft X-ray reflection and analyzed afterwards with Cu-Ka reflection. Some calculations on and simulation of non ideal behaviour of multilayer coatings are presented, mainly focussed on roughness problems. Experimental results for e-beam evaporated and sputter-deposited multilayers are compared and a discussion of possible causes for the differences is given.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. P. Bruijn, M. P. Bruijn, P. Chakraborty, P. Chakraborty, H. van Essen, H. van Essen, J. Verhoeven, J. Verhoeven, M . J. van der Wiel, M . J. van der Wiel, W. J. Bartels, W. J. Bartels, "F-beam Evaporated Multilayer Soft X-ray Coatings, Analyzed With Cu-Kα Radiation", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949667; https://doi.org/10.1117/12.949667


Back to Top