6 May 1985 Physical And Chemical Characterization Of Multilayered Structures
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Abstract
It is important to know the physical and chemical properties of a multilayer if its performance is to be compared to theoretical predictions, or if guidance is needed for the production of superior multilayers. Accurate, nondestructive analytical methods, such as neutron activation analysis, are restricted to certain elements. Certain destructive methods, such as total carbon analysis by combustion, can be sensitive enough for use with very small samples. The method of choice depends upon sensitivity and specificity, both of which are discussed in this paper.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. M. Thorne, L. V. Knight, B. G . Peterson, "Physical And Chemical Characterization Of Multilayered Structures", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949685; https://doi.org/10.1117/12.949685
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