Physical And Chemical Characterization Of Multilayered Structures

J. M. Thorne; L. V. Knight; B. G . Peterson

doi:10.1117/12.949685

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6 May 1985 Physical And Chemical Characterization Of Multilayered Structures

J. M. Thorne, L. V. Knight, B. G . Peterson

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Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949685
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

It is important to know the physical and chemical properties of a multilayer if its performance is to be compared to theoretical predictions, or if guidance is needed for the production of superior multilayers. Accurate, nondestructive analytical methods, such as neutron activation analysis, are restricted to certain elements. Certain destructive methods, such as total carbon analysis by combustion, can be sensitive enough for use with very small samples. The method of choice depends upon sensitivity and specificity, both of which are discussed in this paper.

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J. M. Thorne, L. V. Knight, and B. G . Peterson "Physical And Chemical Characterization Of Multilayered Structures", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949685

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