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6 May 1985 Sputter Deposited Multilayer V-UV Mirrors
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Abstract
The design and fgbrication of aluminum/niobium multilayers to be used as normal-incidence reflectors for 300 A radiation are presented. Preliminary characterization results are discussed showing the effects of interfacial roughness and diffusion.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Felix E. Fernandez and Charles M. Falco "Sputter Deposited Multilayer V-UV Mirrors", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949668
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