6 May 1985 Synchrotron Based Measurements Of The Soft X-Rayperformance Of Thin Film Multilayer Structures
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Abstract
There is a great interest in the application of thin film multilayer structures for x�ray optical elements. We have developed aparatus and techniques to measure the reflectivity of multilayer structures on flat substrates a function of energy at angles from grazing to near normal incidence using a synchrotron. We will present descriptions of our measurement techniques and aparatus along with a comparison between theoretical calculations and experimental data.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. R . Kania, R. J. Bartlett, W. J. Trela, "Synchrotron Based Measurements Of The Soft X-Rayperformance Of Thin Film Multilayer Structures", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949670; https://doi.org/10.1117/12.949670
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