2 January 1986 Measuring Optically Induced Currents With The Laser Scan Microscope
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Abstract
A laser induced photoresponse method is used for visualizing electronic properties of semiconductor materials and operational ICs. There are clear advantages compared to electron beam probing. By modulation of the laser light the method can be extended to internal logic analysis.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hajo Hinkelmann, "Measuring Optically Induced Currents With The Laser Scan Microscope", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949736; https://doi.org/10.1117/12.949736
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