Optical Stethoscopy: Imaging With X/20

D. W. Pohl; W. Denk; U. Duerig

doi:10.1117/12.949732

2 January 1986 Optical Stethoscopy: Imaging With λ/20

D. W. Pohl, W. Denk, U. Duerig

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949732
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

Unprecedented optical image resolution has been obtained using a near-field optical scanner called "optical stethoscope": 20 to 30 nm with blue light of half a micron wavelength! Key element is an extremely small aperture (5-10 nm) placed at the very top of a sharply pointed pyramidal or conical screen. The aperture is scanned in the immediate proximity of the surface to be investigated. The amount of light transmitted by both aperture and sample depends sensitively on the optical properties of the sample in the immediate vicinity of the aperture.

Citation Download Citation

D. W. Pohl, W. Denk, and U. Duerig "Optical Stethoscopy: Imaging With λ/20", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949732

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available