2 January 1986 Piezoelectric Translators With Submicron Accuracy
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Abstract
In manufacturing integrated circuits, the tendency is toward smaller and smaller structures. Therefore the requirements for accurate micropositioning in lithography and wafer handling are growing more stringent. In many cases even a positioning accuracy of 0.1 micron is not good enough. But traditional precision mechanical positioners come to their limits in this range. Play, backlash, elasticity, friction and temperature changes can only be partially eliminated. One possible way to overcome these problems is with positioners based on the inverse piezo effect.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Karl Spanner, Harry Marth, Warren Gutheil, "Piezoelectric Translators With Submicron Accuracy", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949730; https://doi.org/10.1117/12.949730
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