2 January 1986 Surface Topography Studies Of Nanocrystalline Si by STM
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Abstract
Scanning tunneling microscopy (STM) is optimally suited to study surface topography and roughness at the nanometer scale where optical and other methods fail. The topography of nanocrystalline silicon is chosen as an example to demonstrate the outstanding potential of the new technique.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. W. Pohl, D. W. Pohl, J. K. Gimzewski, J. K. Gimzewski, A. Humbert, A. Humbert, S. Vepek, S. Vepek, } "Surface Topography Studies Of Nanocrystalline Si by STM", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949738; https://doi.org/10.1117/12.949738
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