Backside Charging Of The CCD

James Janesick; Tom Elliott; Taher Daud; Jim McCarthy

doi:10.1117/12.950308

11 December 1985 Backside Charging Of The CCD

James Janesick, Tom Elliott, Taher Daud, Jim McCarthy

Proceedings Volume 0570, Solid-State Imaging Arrays; (1985) https://doi.org/10.1117/12.950308
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

Until recently, the usefulness of the charge coupled device (CCD) as an imaging sensor was thought to be restricted to within rather narrow boundaries of the visible and near IR spectrum. However, since the discovery of backside charging the full potential of CCD performance is now realized. Indeed, the technique of backside charging not only allows the CCD to be used directly in the UV, EUV, and soft X-ray regimes, it has opened up new opportunities in optimizing charge collection processes as well. In this paper, we discuss in considerable detail the technique of backside charging, describing its properties, use, and potential in the future as it applies to the CCD.

Citation Download Citation

James Janesick, Tom Elliott, Taher Daud, and Jim McCarthy "Backside Charging Of The CCD", Proc. SPIE 0570, Solid-State Imaging Arrays, (11 December 1985); https://doi.org/10.1117/12.950308

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