11 September 1985 Novel V-groove Structures On Silicon
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Proceedings Volume 0578, Integrated Optical Circuit Engineering II; (1985) https://doi.org/10.1117/12.950752
Event: 1985 Cambridge Symposium, 1985, Cambridge, United States
Abstract
We report the fabrication of novel V-groove structures by etching silicon twice in an anisotropic etch solution. This technique is capable of yielding micron size patterns from large patterns. For example, we have been able to reduce a 7 μm pattern down to 1 μm. This technique finds useful application in novel diffracting grating structures.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Sriram, "Novel V-groove Structures On Silicon", Proc. SPIE 0578, Integrated Optical Circuit Engineering II, (11 September 1985); doi: 10.1117/12.950752; https://doi.org/10.1117/12.950752
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