Three-Dimensional Surface Metrology Using A Computer-Controlled Non-Contact Instrument

Keith N. Prettyjohns; James C. Wyant

doi:10.1117/12.952391

16 July 1986 Three-Dimensional Surface Metrology Using A Computer-Controlled Non-Contact Instrument

Keith N. Prettyjohns, James C. Wyant

Proceedings Volume 0599, Optics in Engineering Measurement; (1986) https://doi.org/10.1117/12.952391
Event: 1985 International Technical Symposium/Europe, 1985, Cannes, France

Abstract

WYKO Corporation has developed a new instrument that is capable of measuring surface heights over an area from 0.5 mm square to 4.0 mm square. The instrument is based upon an interference microscope and uses direct phase measurement techniques to allow computer calculation and three-dimensional graphic display of the surface heights. The instrument uses a 256-by-256 grid of data points obtained from a photodiode array which provides a lateral resolution of 2 μm on the surface. Computer software has been written to perform statistical analysis of the surface under test, including surface roughness measurements and autocovariance. Results are shown for measurements of optical surfaces as well as magnetic media surfaces.

Citation Download Citation

Keith N. Prettyjohns and James C. Wyant "Three-Dimensional Surface Metrology Using A Computer-Controlled Non-Contact Instrument", Proc. SPIE 0599, Optics in Engineering Measurement, (16 July 1986); https://doi.org/10.1117/12.952391

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