Liquid chlorides and gaseous hydrides have been decomposed by low pressure, plasma-enhanced chemical vapour deposition (PECVD) to give Ge-Se and Ge-S glasses. Their glass transition temperatures were obtained by thermal analysis and their compositions were examined by infrared spectroscopy and energy dispersive X-ray analysis. Results from the prototype deposition system are being used to develop a higher pressure PECVD process.
J. I. B. Wilson,
"Plasma Deposition Of Chalcogenide Glass For Infrared Fibres", Proc. SPIE 0618, Infrared Optical Materials and Fibers IV, (12 May 1986); doi: 10.1117/12.961103; https://doi.org/10.1117/12.961103