12 May 1986 Plasma Deposition Of Chalcogenide Glass For Infrared Fibres
Author Affiliations +
Proceedings Volume 0618, Infrared Optical Materials and Fibers IV; (1986) https://doi.org/10.1117/12.961103
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
Liquid chlorides and gaseous hydrides have been decomposed by low pressure, plasma-enhanced chemical vapour deposition (PECVD) to give Ge-Se and Ge-S glasses. Their glass transition temperatures were obtained by thermal analysis and their compositions were examined by infrared spectroscopy and energy dispersive X-ray analysis. Results from the prototype deposition system are being used to develop a higher pressure PECVD process.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. I. B. Wilson, D. Blanc, "Plasma Deposition Of Chalcogenide Glass For Infrared Fibres", Proc. SPIE 0618, Infrared Optical Materials and Fibers IV, (12 May 1986); doi: 10.1117/12.961103; https://doi.org/10.1117/12.961103
PROCEEDINGS
6 PAGES


SHARE
Back to Top