12 May 1986 Plasma Deposition Of Chalcogenide Glass For Infrared Fibres
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Proceedings Volume 0618, Infrared Optical Materials and Fibers IV; (1986) https://doi.org/10.1117/12.961103
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
Liquid chlorides and gaseous hydrides have been decomposed by low pressure, plasma-enhanced chemical vapour deposition (PECVD) to give Ge-Se and Ge-S glasses. Their glass transition temperatures were obtained by thermal analysis and their compositions were examined by infrared spectroscopy and energy dispersive X-ray analysis. Results from the prototype deposition system are being used to develop a higher pressure PECVD process.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. I. B. Wilson, J. I. B. Wilson, D. Blanc, D. Blanc, } "Plasma Deposition Of Chalcogenide Glass For Infrared Fibres", Proc. SPIE 0618, Infrared Optical Materials and Fibers IV, (12 May 1986); doi: 10.1117/12.961103; https://doi.org/10.1117/12.961103
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