5 August 1986 Angle-Scanning Laser Interferometer For Film Thickness Measurement
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Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961153
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
A laser interferometer where intensity is measured as function of incidence angle is described. Number of fringes and/or their location in interferogram defines plastic film thickness. With simplest method of signal processing, thickness accuracy is within 2% for films over 50 micrometers. The fringe interval method improves accuracy to within 0.1% for films over 10 micrometers. Special least-square methods may improve accuracy further or even allow a simultaneous index of refraction and thickness measurement. The method is intended for industrial on-line monitoring of plastic film thickness.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Piotr W. Kiedron, Piotr W. Kiedron, } "Angle-Scanning Laser Interferometer For Film Thickness Measurement", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); doi: 10.1117/12.961153; https://doi.org/10.1117/12.961153
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