Thickness Measurement Using Scanned Attenuated Total Reflection Technique

Jin-Chyuan Chen; Ding-Liang Chiao; Chien Chou

doi:10.1117/12.961157

5 August 1986 Thickness Measurement Using Scanned Attenuated Total Reflection Technique

Jin-Chyuan Chen, Ding-Liang Chiao, Chien Chou

Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961157
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

An improved method for determining the thin film thickness in terms of the variation of reflectivity in Attenuated Total Reflection (ATR) is proposed. In which, the correlation of the difference of thin film thickness (1d) and reflectivity (R) is derived on the basis of Fresnel's formula. In addition, a scanning unit is specially designed to scan the laser beam and detector synchronously. Experimental results indicate that the measurement accuracy is not affected by small fluctuation of the incident angle and the reflectivity change. Moreover, possible applications of this technique in developing the displacement sensor with high sensitivity are also suggested.

Citation Download Citation

Jin-Chyuan Chen, Ding-Liang Chiao, and Chien Chou "Thickness Measurement Using Scanned Attenuated Total Reflection Technique", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); https://doi.org/10.1117/12.961157

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