5 August 1986 Thickness Measurement Using Scanned Attenuated Total Reflection Technique
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Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961157
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
An improved method for determining the thin film thickness in terms of the variation of reflectivity in Attenuated Total Reflection (ATR) is proposed. In which, the correlation of the difference of thin film thickness (1d) and reflectivity (R) is derived on the basis of Fresnel's formula. In addition, a scanning unit is specially designed to scan the laser beam and detector synchronously. Experimental results indicate that the measurement accuracy is not affected by small fluctuation of the incident angle and the reflectivity change. Moreover, possible applications of this technique in developing the displacement sensor with high sensitivity are also suggested.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jin-Chyuan Chen, Jin-Chyuan Chen, Ding-Liang Chiao, Ding-Liang Chiao, Chien Chou, Chien Chou, } "Thickness Measurement Using Scanned Attenuated Total Reflection Technique", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); doi: 10.1117/12.961157; https://doi.org/10.1117/12.961157
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