9 June 1986 Fiber Optic Coupler For VHSIC/VLSI Interconnects
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Proceedings Volume 0625, Optical Computing; (1986); doi: 10.1117/12.963493
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
A new optical interconnect technique, suitable for very high packing densities, is proposed for implementation in VHSIC/VLSI circuits. The approach allows vertical bonding.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul R. Prucnal, Eric R. Fossum, Richard M. Osgood, "Fiber Optic Coupler For VHSIC/VLSI Interconnects", Proc. SPIE 0625, Optical Computing, (9 June 1986); doi: 10.1117/12.963493; https://doi.org/10.1117/12.963493
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KEYWORDS
Sensors

Etching

Optical interconnects

Cladding

Silicon

Single mode fibers

Fiber lasers

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