20 August 1986 The Digital Piezo Transducer
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The Digital Piezo Transducer (DPT) is a piezo electric actuator incorporating a capacitance micrometer as an integrated position sensor. This internal micrometer has a position-al resolution of much better than a nanometre and 10 hysteresis. The DPT is operated in a closed servo loop and is capable of sub-nanometre resolution, repeatability and stability. Its response time is 0.2 msecs and it has a maximum range of 50μm.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. D. Atherton, P. D. Atherton, T. R. Hicks, T. R. Hicks, R. C. Sidey, R. C. Sidey, N. K. Reay, N. K. Reay, } "The Digital Piezo Transducer", Proc. SPIE 0628, Advanced Technology Optical Telescopes III, (20 August 1986); doi: 10.1117/12.963563; https://doi.org/10.1117/12.963563


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