20 August 1986 The Digital Piezo Transducer
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Abstract
The Digital Piezo Transducer (DPT) is a piezo electric actuator incorporating a capacitance micrometer as an integrated position sensor. This internal micrometer has a position-al resolution of much better than a nanometre and 10 hysteresis. The DPT is operated in a closed servo loop and is capable of sub-nanometre resolution, repeatability and stability. Its response time is 0.2 msecs and it has a maximum range of 50μm.
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P. D. Atherton, P. D. Atherton, T. R. Hicks, T. R. Hicks, R. C. Sidey, R. C. Sidey, N. K. Reay, N. K. Reay, } "The Digital Piezo Transducer", Proc. SPIE 0628, Advanced Technology Optical Telescopes III, (20 August 1986); doi: 10.1117/12.963563; https://doi.org/10.1117/12.963563
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