A Quantitative Assessment Of Image Reversal, A Candidate For A Submicron Process With Improved Linewidth Control

Rupert M.R. Gijsen; Hennie J.J. Kroon; Frans A. Vollenbroek; Rene Vervoordeldonk

doi:10.1117/12.963632

9 July 1986 A Quantitative Assessment Of Image Reversal, A Candidate For A Submicron Process With Improved Linewidth Control

Rupert M.R. Gijsen, Hennie J.J. Kroon, Frans A. Vollenbroek, Rene Vervoordeldonk

Author Affiliations +

Proceedings Volume 0631, Advances in Resist Technology and Processing III; (1986) https://doi.org/10.1117/12.963632
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

The performance of the image reversal process is evaluated. As image reversal includes process parameters to control the slope of the resist profile it offers the possibility to compensate for the bulk effect. Additionally dye can be added to the resist to some extent, to reduce reflections at the substrate, without degrading the slope. Data was collected to quantify the potential of image reversal with respect to the latitude for development and exposure dose variations for both the imidazole, the ammonia and the AZ5214 process. Trends indicating how to find the best operating point for each process will be discussed. To demonstrate the submicron capabilities of image reversal resist patterns with lines and spaces down to 0.5 μm over 0.5 μm topography will be shown.

Citation Download Citation

Rupert M.R. Gijsen, Hennie J.J. Kroon, Frans A. Vollenbroek, and Rene Vervoordeldonk "A Quantitative Assessment Of Image Reversal, A Candidate For A Submicron Process With Improved Linewidth Control", Proc. SPIE 0631, Advances in Resist Technology and Processing III, (9 July 1986); https://doi.org/10.1117/12.963632

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available