A Simple, Compact, High Brightness Source For X-Ray Lithography And X-Ray Radiography

Andrew M. Hawryluk

doi:10.1117/12.963693

30 June 1986 A Simple, Compact, High Brightness Source For X-Ray Lithography And X-Ray Radiography

Andrew M. Hawryluk

Proceedings Volume 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V; (1986) https://doi.org/10.1117/12.963693
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

A simple, compact, high brightness x-ray source has recently been built. This source utilizes a commercially available, cylindrical geometry electron beam evaporator, which has been modified to enhance the thermal cooling to the anode. Cooling is accomplished by using standard, low-conductivity laboratory water, with an inlet pressure of less than 50 psi, and a flow rate of approximately 0.3 gal./min. The anode is an inverted cone geometry for efficient cooling. The x-ray source has a measured sub-millimeter spot size (FWHM). The anode has been operated at 1 KW e-beam power (10 KV, 100 ma). Higher operating levels will be investigated. A variety of different x-ray lines can be obtained by the simple interchange of anodes of different materials. Typical anodes are made from easily machined metals, or materials which are vacuum deposited onto a copper anode. Typically, a few microns of material are sufficient to stop 10 KV electrons without significantly decreasing the thermal conductivity through the anode. The small size and high brightness of this source make it useful for step and repeat exposures over several square centimeter areas, especially in a research laboratory environment. For an aluminum anode, the estimated Al-K x-ray flux at 10 cms. from the source is 70 μW/cm².

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Andrew M. Hawryluk "A Simple, Compact, High Brightness Source For X-Ray Lithography And X-Ray Radiography", Proc. SPIE 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (30 June 1986); https://doi.org/10.1117/12.963693

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KEYWORDS

X-rays

Copper

Aluminum

X-ray lithography

X-ray sources

Charge-coupled devices

Lithography

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