21 October 1986 The Metrology Of Grazing Incidence Optics At The National Physical Laboratory
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Proceedings Volume 0640, Grazing Incidence Optics; (1986) https://doi.org/10.1117/12.964371
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States
Abstract
The ultimate test of an optical component is its performance under conditions similar to those that it will encounter in service. Prior to this stage, precision dimensional measurement is the key to achieving the specification, and a range of measuring instruments has been developed specifically for the metrology of grazing incidence optics. These instruments can be calibrated to uncertainties of about 10 picometres by X-ray interferometry.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Franks, A. Franks, } "The Metrology Of Grazing Incidence Optics At The National Physical Laboratory", Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); doi: 10.1117/12.964371; https://doi.org/10.1117/12.964371
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