3 November 1986 An Optical Lever For The Metrology Of Grazing Incidence Optics
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Proceedings Volume 0645, Optical Manufacturing, Testing and Aspheric Optics; (1986) https://doi.org/10.1117/12.964498
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States
Abstract
Research Optics & Development, Inc. is using a slope tracing profilometer to measure the figure of optical surfaces which cannot be measured conveniently by interferometric means. As a metrological tool, the technique has its greatest advantage as an in-process easurement system. An optician can easily convert from polishing to measurement in less than a minute of time. This rapid feedback allows figure correction with minimal wasted effort and setup time. The present configuration of the slope scanner provides resolutions to 1 micro-radian. By implementing minor modifications, the resolution could be improved by an order of magnitude.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alan E. DeCew, Alan E. DeCew, Robert W. Wagner, Robert W. Wagner, "An Optical Lever For The Metrology Of Grazing Incidence Optics", Proc. SPIE 0645, Optical Manufacturing, Testing and Aspheric Optics, (3 November 1986); doi: 10.1117/12.964498; https://doi.org/10.1117/12.964498
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