In Process Measurement Of Radii Of Curvature On Micromachined Spherical Zones

P. Langenbeck

doi:10.1117/12.964482

3 November 1986 In Process Measurement Of Radii Of Curvature On Micromachined Spherical Zones

P. Langenbeck

Proceedings Volume 0645, Optical Manufacturing, Testing and Aspheric Optics; (1986) https://doi.org/10.1117/12.964482
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States

Abstract

Measurement of radii of curvature (cv, cc) in the 'ange 1 to 30 m is hardly possible using available metrology equipment. An ancient method' of long radius measurement is reevaluated and adapted to in situ measurments on spherical generators . Finding the auto-collimation position is eased by strioscopic interferometry which at the same time allows Foucault- and interferometric surface testing. Radii typical in high power lasers from 1 - 30 m are subject to this type of radius measurement. The inaccuracy is in the order of dR/R = 0,05 %.

Citation Download Citation

P. Langenbeck "In Process Measurement Of Radii Of Curvature On Micromachined Spherical Zones", Proc. SPIE 0645, Optical Manufacturing, Testing and Aspheric Optics, (3 November 1986); https://doi.org/10.1117/12.964482

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