3 November 1986 Statistical And Signal Processing Concepts In Surface Metrology
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Proceedings Volume 0645, Optical Manufacturing, Testing and Aspheric Optics; (1986) https://doi.org/10.1117/12.964495
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States
Abstract
This paper proposes the use of a simple two-scale model of surface roughness for testing and specifying the topographic figure and finish of synchrotron-radiation mirrors. In this approach the effects of figure and finish are described in terms of their slope distribution and per spectrum, respectively, which are then combined with the system point spread function to produce a composite image. The result can be used to predict mirror performance or to translate design requirements into manufacturing specifications. Pacing problems in this approach are the development of a practical long-trace slope-profiling instrument and realistic statistical models for figure and finish errors.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E L Church, P. Z. Takacs, "Statistical And Signal Processing Concepts In Surface Metrology", Proc. SPIE 0645, Optical Manufacturing, Testing and Aspheric Optics, (3 November 1986); doi: 10.1117/12.964495; https://doi.org/10.1117/12.964495
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